Influence of defects in SiOx thin films on their barrier properties
dc.contributor.author
Grüniger, A.
dc.contributor.author
Rudolf von Rohr, Philipp
dc.date.accessioned
2017-06-10T01:29:28Z
dc.date.available
2017-06-10T01:29:28Z
dc.date.issued
2004-07
dc.identifier.issn
0040-6090
dc.identifier.issn
1879-2731
dc.identifier.other
10.1016/j.tsf.2003.12.146
dc.identifier.uri
http://hdl.handle.net/20.500.11850/50123
dc.language.iso
en
dc.publisher
Amsterdam
dc.subject
Diffusion barrier
dc.subject
Gas permeation
dc.subject
Defects
dc.subject
Silicon oxide
dc.title
Influence of defects in SiOx thin films on their barrier properties
dc.type
Conference Paper
ethz.journal.title
Thin Solid Films
ethz.journal.volume
459
ethz.journal.issue
1-2
ethz.journal.abbreviated
Thin Solid Films
ethz.pages.start
308
ethz.pages.end
312
ethz.event
8th European Vacuum Congress (EVC-8)/2nd Annual Conference of the German-Vacuum-Society (DVG)
ethz.event.location
Berlin, Germany
ethz.event.date
June 23 - 26, 2003
ethz.notes
Available online 16 March 2004.
ethz.identifier.wos
ethz.identifier.nebis
000056364
ethz.publication.place
Elsevier
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-10T01:30:35Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f4c2aa7f56617
ethz.ecitpid
pub:82108
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-15T02:41:22Z
ethz.rosetta.lastUpdated
2023-02-06T11:18:48Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [34969]