Determination of the material properties of microstructures by laser based ultrasound
dc.contributor.author
Profunser, D.M.
dc.contributor.author
Vollmann, J.
dc.contributor.author
Dual, Jürg
dc.date.accessioned
2017-06-10T01:58:06Z
dc.date.available
2017-06-10T01:58:06Z
dc.date.issued
2004-04
dc.identifier.other
10.1016/j.ultras.2004.01.049
dc.identifier.uri
http://hdl.handle.net/20.500.11850/50875
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Pump-probe technique
dc.subject
Bulk waves
dc.subject
Mechanical properties
dc.subject
Membrane
dc.subject
Silicon-nitride
dc.title
Determination of the material properties of microstructures by laser based ultrasound
dc.type
Conference Paper
ethz.journal.title
Ultrasonics
ethz.journal.volume
42
ethz.journal.issue
1-9
ethz.pages.start
641
ethz.pages.end
646
ethz.event
Ultrasonics International 2003 Meetng
ethz.event.location
Granada, Spain
ethz.event.date
June 30 - July 03, 2003
ethz.identifier.wos
ethz.identifier.nebis
000056781
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-10T01:58:33Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f5c822f519663
ethz.ecitpid
pub:82990
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T18:06:38Z
ethz.rosetta.lastUpdated
2024-02-01T18:50:32Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [34963]