Highly Efficient Grating Coupler for Silicon Nitride Photonics with Large Fabrication Tolerance
Abstract
We demonstrate low-loss fiber-to-chip coupling via a-Si grating couplers on top of SiN waveguides for C-band TE light. The suggested simple scheme is fabrication tolerant and offers a path towards coupling efficiencies above -1 dB.
Permanent link
https://doi.org/10.3929/ethz-b-000526308Publication status
publishedExternal links
Book title
Integrated Photonics Research, Silicon and Nanophotonics : part of Advanced Photonics CongressPages / Article No.
Publisher
OSA PublishingEvent
Organisational unit
03974 - Leuthold, Juerg / Leuthold, Juerg
02635 - Institut für Elektromagnetische Felder / Electromagnetic Fields Laboratory
Funding
871658 - Neuro-augmented 112Gbaud CMOS plasmonic transceiver platform for Intra- and Inter-DCI (EC)
871391 - Energy- and Size-efficient Ultra-fast Plasmonic Circuits for Neuromorphic Computing Architectures (EC)
Notes
Session Novel Fabrication Processes and Solutions II (IM4A)More
Show all metadata
ETH Bibliography
yes
Altmetrics