Deposition of SiO2-like diffusion barriers on PET and paper by PECVD
dc.contributor.author
Grüniger, A.
dc.contributor.author
Rudolf von Rohr, Philipp
dc.date.accessioned
2017-06-10T07:23:46Z
dc.date.available
2017-06-10T07:23:46Z
dc.date.issued
2003-09
dc.identifier.issn
0257-8972
dc.identifier.issn
1879-3347
dc.identifier.other
10.1016/S0257-8972(03)00327-X
dc.identifier.uri
http://hdl.handle.net/20.500.11850/53658
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Silicon oxide
dc.subject
Diffusion barrier
dc.subject
Paper
dc.subject
PECVD
dc.subject
Oxygen permeability
dc.title
Deposition of SiO2-like diffusion barriers on PET and paper by PECVD
dc.type
Conference Paper
ethz.journal.title
Surface and Coatings Technology
ethz.journal.volume
174-175
ethz.journal.abbreviated
Surf. Coat. Technol.
ethz.pages.start
1043
ethz.pages.end
1047
ethz.event
8th International Conference on Plasma Surface Engineering
ethz.event.location
Garmisch Partenkirchen, Germany
ethz.event.date
September 9-13, 2002
ethz.identifier.wos
ethz.identifier.scopus
ethz.identifier.nebis
000035352
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-10T07:25:33Z
ethz.source
ECIT
ethz.identifier.importid
imp59364f994c7e670949
ethz.ecitpid
pub:86814
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-17T08:41:08Z
ethz.rosetta.lastUpdated
2024-02-01T19:05:57Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [34973]