Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
dc.contributor.author
Paskaleva, Albena
dc.contributor.author
Lemberger, Martin
dc.contributor.author
Zürcher, Stefan
dc.contributor.author
Bauer, Anton J.
dc.contributor.author
Frey, Lothar
dc.contributor.author
Ryssel, Heiner
dc.date.accessioned
2017-06-10T08:00:16Z
dc.date.available
2017-06-10T08:00:16Z
dc.date.issued
2003-08
dc.identifier.issn
0026-2714
dc.identifier.issn
1872-941X
dc.identifier.other
10.1016/S0026-2714(03)00180-X
dc.identifier.uri
http://hdl.handle.net/20.500.11850/54447
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
dc.type
Journal Article
ethz.journal.title
Microelectronics Reliability
ethz.journal.volume
43
ethz.journal.issue
8
ethz.journal.abbreviated
Microelectron. Reliab.
ethz.pages.start
1253
ethz.pages.end
1257
ethz.notes
Received 9 January 2003, Revised 20 February 2003, Available online 17 July 2003.
ethz.identifier.wos
ethz.identifier.nebis
001933457
ethz.publication.place
Kidlington
ethz.publication.status
published
ethz.date.deposited
2017-06-10T08:02:04Z
ethz.source
ECIT
ethz.identifier.importid
imp59364fa95d56277820
ethz.ecitpid
pub:87889
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-20T12:58:28Z
ethz.rosetta.lastUpdated
2024-02-01T19:10:43Z
ethz.rosetta.versionExported
true
ethz.COinS
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Journal Article [128830]