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dc.contributor.author
Hafizovic, S.
dc.contributor.author
Hirai, Y.
dc.contributor.author
Tabata, Osamu
dc.contributor.author
Korvink, J. G.
dc.date.accessioned
2017-06-10T08:03:30Z
dc.date.available
2017-06-10T08:03:30Z
dc.date.issued
2003
dc.identifier.isbn
0-7803-7731-1
dc.identifier.other
10.1109/SENSOR.2003.1217079
dc.identifier.uri
http://hdl.handle.net/20.500.11850/54506
dc.language.iso
en
dc.publisher
IEEE Service Center
dc.subject
Simulation
dc.subject
X-ray lithography
dc.subject
MEMS
dc.subject
LIGA
dc.title
X3D
dc.type
Conference Paper
ethz.title.subtitle
3D X-ray lithography and development simulation for MEMS
ethz.book.title
Digest of technical papers / Transducers’03 Boston - The 12th International Conference on Solid-State Sensors, Actuators and Microsystems
ethz.journal.volume
2
ethz.pages.start
1570
ethz.pages.end
1573
ethz.event
12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03)
ethz.event.location
Boston, MA
ethz.event.date
June 8-12, 2003
ethz.identifier.wos
ethz.identifier.nebis
004579349
ethz.publication.place
Piscataway, N.J.
ethz.publication.status
published
ethz.date.deposited
2017-06-10T08:06:41Z
ethz.source
ECIT
ethz.identifier.importid
imp59364faaa23c443392
ethz.ecitpid
pub:87948
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T14:09:14Z
ethz.rosetta.lastUpdated
2017-07-14T14:09:14Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=X3D&rft.date=2003&rft.volume=2&rft.spage=1570&rft.epage=1573&rft.au=Hafizovic,%20S.&Hirai,%20Y.&Tabata,%20Osamu&Korvink,%20J.%20G.&rft.isbn=0-7803-7731-1&rft.genre=proceeding&rft_id=info:doi/10.1109/SENSOR.2003.1217079&rft.btitle=Digest%20of%20technical%20papers%20/%20Transducers%E2%80%9903%20Boston%20-%20The%2012th%20International%20Conference%20on%20Solid-State%20Sensors,%20Actuators%20and%20Mi
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