Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
dc.contributor.author
Romano, Lucia
dc.contributor.author
Jefimovs, Konstantins
dc.date.accessioned
2023-10-18T10:35:57Z
dc.date.available
2023-09-04T06:53:54Z
dc.date.available
2023-10-18T10:35:57Z
dc.date.issued
2023-08
dc.identifier.issn
2072-666X
dc.identifier.other
10.3390/mi14081630
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/629508
dc.identifier.doi
10.3929/ethz-b-000629508
dc.format
application/pdf
en_US
dc.language.iso
en
en_US
dc.publisher
MDPI
en_US
dc.rights.uri
http://creativecommons.org/licenses/by/4.0/
dc.title
Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
en_US
dc.type
Other Journal Item
dc.rights.license
Creative Commons Attribution 4.0 International
dc.date.published
2023-08-18
ethz.journal.title
Micromachines
ethz.journal.volume
14
en_US
ethz.journal.issue
8
en_US
ethz.journal.abbreviated
Micromachines
ethz.pages.start
1630
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ethz.size
2 p.
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ethz.version.deposit
publishedVersion
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ethz.identifier.wos
ethz.identifier.scopus
ethz.publication.place
Basel
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ethz.publication.status
published
en_US
ethz.date.deposited
2023-09-04T06:53:56Z
ethz.source
SCOPUS
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2023-10-18T10:35:58Z
ethz.rosetta.lastUpdated
2024-02-03T05:21:09Z
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