At-wavelength metrology using the moire fringe analysis method based on a two dimensional grating interferometer
dc.contributor.author
Wang, Hongchang
dc.contributor.author
Berujon, Sebastien
dc.contributor.author
Pape, Ian
dc.contributor.author
Rutishauser, Simon
dc.contributor.author
David, Christian
dc.contributor.author
Sawhney, Kawal
dc.date.accessioned
2017-06-10T16:39:24Z
dc.date.available
2017-06-10T16:39:24Z
dc.date.issued
2013-05
dc.identifier.issn
0168-9002
dc.identifier.issn
1872-9576
dc.identifier.other
10.1016/j.nima.2012.10.096
dc.identifier.uri
http://hdl.handle.net/20.500.11850/66485
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
X-ray
dc.subject
Metrology
dc.subject
FFT
dc.subject
Two dimensional grating interferometer
dc.subject
At-wavelength
dc.subject
Synchrotron radiation
dc.title
At-wavelength metrology using the moire fringe analysis method based on a two dimensional grating interferometer
dc.type
Journal Article
ethz.journal.title
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
ethz.journal.volume
710
ethz.journal.abbreviated
Nucl. instrum. methods phys. res., Sect. A, Accel. spectrom. detect. assoc. equip.
ethz.pages.start
78
ethz.pages.end
81
ethz.notes
Available online 7 November 2012.
ethz.identifier.wos
ethz.identifier.nebis
000029139
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-10T16:41:48Z
ethz.source
ECIT
ethz.identifier.importid
imp5936509183bb747583
ethz.ecitpid
pub:105960
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T16:45:38Z
ethz.rosetta.lastUpdated
2023-02-06T11:53:06Z
ethz.rosetta.versionExported
true
ethz.COinS
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