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dc.contributor.author
Rey, Antje
dc.contributor.author
Lörtscher, Emanuel
dc.contributor.author
Kuemin, Cyrill
dc.contributor.author
Jain, Titoo
dc.contributor.author
Wolf, Heiko
dc.contributor.author
Bjørnholm, Thomas
dc.contributor.author
Stemmer, Andreas
dc.contributor.author
Riel, Heike
dc.date.accessioned
2017-06-10T17:58:55Z
dc.date.available
2017-06-10T17:58:55Z
dc.date.issued
2011
dc.identifier.uri
http://hdl.handle.net/20.500.11850/67970
dc.language.iso
en
dc.publisher
FIRST-Lab; Raith GmbH
dc.title
Electron Beam Lithography for Nanoelectronics and Nanoparticle Assembly Applications
dc.type
Other Conference Item
ethz.event
Electron Beam Lithography Workshop
ethz.event.location
Zürich, Switzerland
ethz.event.date
November 15, 2011
ethz.notes
.
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03444 - Stemmer, Andreas / Stemmer, Andreas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03444 - Stemmer, Andreas / Stemmer, Andreas
ethz.date.deposited
2017-06-10T17:59:30Z
ethz.source
ECIT
ethz.identifier.importid
imp593650af87d8757971
ethz.ecitpid
pub:108053
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-20T17:17:19Z
ethz.rosetta.lastUpdated
2018-11-02T09:52:36Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Electron%20Beam%20Lithography%20for%20Nanoelectronics%20and%20Nanoparticle%20Assembly%20Applications&rft.date=2011&rft.au=Rey,%20Antje&L%C3%B6rtscher,%20Emanuel&Kuemin,%20Cyrill&Jain,%20Titoo&Wolf,%20Heiko&rft.genre=unknown&rft.btitle=Electron%20Beam%20Lithography%20for%20Nanoelectronics%20and%20Nanoparticle%20Assembly%20Applications
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