The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems
Publication status
publishedExternal links
Journal / series
Sensors and Actuators A: PhysicalVolume
Pages / Article No.
Publisher
ElsevierEvent
Subject
Alumina; Nano-electromechanical systems; Micro-electromechanical systems; Young's modulus; Berkovitch hardness; Intrinsic stressOrganisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Received 7 June 2005, Revised 22 December 2005, Accepted 13 January 2006, Available online 28 February 2006.More
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