Control of a High Performance 3 DOF Linear Direct Drive Operating with Submicron Precision
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Date
1998Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedBook title
The Fourth International Conference on Motion and Vibration Control. ProceedingsVolume
Pages / Article No.
Publisher
Institute of Robotics, ETH ZurichEvent
Organisational unit
03737 - Siegwart, Roland Y. / Siegwart, Roland Y.
Related publications and datasets
Is part of: http://hdl.handle.net/20.500.11850/81690
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ETH Bibliography
yes
Altmetrics