Characterization of 2D dopant profiles for the design of proton implanted high-voltage super junction
dc.contributor.author
Buzzo, Marco
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Rub, Michael
dc.contributor.author
Fichtner, Wolfgang
dc.date.accessioned
2017-06-11T10:07:10Z
dc.date.available
2017-06-11T10:07:10Z
dc.date.issued
2005
dc.identifier.isbn
0-7803-9301-5
dc.identifier.other
10.1109/IPFA.2005.1469180
dc.identifier.uri
http://hdl.handle.net/20.500.11850/85827
dc.language.iso
en
dc.publisher
IEEE
dc.title
Characterization of 2D dopant profiles for the design of proton implanted high-voltage super junction
dc.type
Conference Paper
ethz.book.title
Proc. of IEEE 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
ethz.pages.start
285
ethz.pages.end
289
ethz.event
The 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2005)
ethz.event.location
Singapore
ethz.event.date
June 27 - July 1, 2005
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
03228 - Fichtner, Wolfgang
ethz.leitzahl.certified
03228 - Fichtner, Wolfgang
ethz.date.deposited
2017-06-11T10:09:01Z
ethz.source
ECIT
ethz.identifier.importid
imp59365208701a999487
ethz.ecitpid
pub:135161
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T02:52:31Z
ethz.rosetta.lastUpdated
2024-02-01T21:56:50Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Characterization%20of%202D%20dopant%20profiles%20for%20the%20design%20of%20proton%20implanted%20high-voltage%20super%20junction&rft.date=2005&rft.spage=285&rft.epage=289&rft.au=Buzzo,%20Marco&Ciappa,%20Mauro&Rub,%20Michael&Fichtner,%20Wolfgang&rft.isbn=0-7803-9301-5&rft.genre=proceeding&rft_id=info:doi/10.1109/IPFA.2005.1469180&rft.btitle=Proc.%20of%20IEEE%2012th%20International%20Symposium%20on%20the%20Physical%20and%20Failure%20Analysis%20of%20Integrated%20Circuits%20(IPFA)
Files in this item
| Files | Size | Format | Open in viewer |
|---|---|---|---|
|
There are no files associated with this item. |
|||
Publication type
-
Conference Paper [35315]