Dynamics of CMOS-based thermally actuated cantilever arrays for force microscopy
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Date
2004Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Sensors and Actuators A: PhysicalVolume
Pages / Article No.
Publisher
ElsevierEvent
Subject
Cantilever; Thermal actuation; CMOS; AFM; Force microscopyOrganisational unit
03263 - Baltes, Henry03684 - Hierlemann, Andreas / Hierlemann, Andreas
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ETH Bibliography
yes
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