Synthesis and characterization of copper and titanium compounds and their application as precursors in chemical vapor deposition
dc.contributor.author
Plappert, Elisabeth-Charlotte
dc.contributor.supervisor
Nesper, Reinhard Friedrich
dc.contributor.supervisor
Venanzi, Luigi M.
dc.date.accessioned
2017-06-13T01:37:39Z
dc.date.available
2017-06-13T01:37:39Z
dc.date.issued
1995
dc.identifier.uri
http://hdl.handle.net/20.500.11850/141975
dc.identifier.doi
10.3929/ethz-a-001419996
dc.format
application/pdf
dc.language.iso
en
dc.publisher
ETH Zürich
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
KUPFERORGANISCHE VERBINDUNGEN
dc.subject
TITANORGANISCHE VERBINDUNGEN
dc.subject
CHEMISCHE SYNTHESEN + CHEMISCHE REAKTIONEN
dc.subject
ZIRKONIUMORGANISCHE VERBINDUNGEN
dc.subject
EPITAXIALSCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN)
dc.subject
COPPER-ORGANIC COMPOUNDS
dc.subject
TITANIUM-ORGANIC COMPOUNDS
dc.subject
CHEMICAL SYNTHESIS + CHEMICAL REACTIONS
dc.subject
ZIRCONIUM-ORGANIC COMPOUNDS
dc.subject
THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION (PHYSICS OF MOLECULAR SYSTEMS)
dc.title
Synthesis and characterization of copper and titanium compounds and their application as precursors in chemical vapor deposition
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
208 S.
ethz.code.ddc
DDC - DDC::5 - Science::540 - Chemistry
ethz.code.ddc
DDC - DDC::5 - Science::540 - Chemistry
ethz.notes
Diss. Naturwiss. ETH Zürich, Nr. 10996, 1995. Ref.: L. M. Venanzi ; Korref.: R. Nesper ; Korref.: K. H. Dahmen.
ethz.identifier.diss
10996
ethz.identifier.nebis
001419996
ethz.publication.place
Zürich
ethz.publication.status
published
ethz.date.deposited
2017-06-13T01:39:04Z
ethz.source
ECOL
ethz.identifier.importid
imp593669f86933485832
ethz.ecolpid
eth:39712
ethz.eth
yes
ethz.availability
Closed access
ethz.rosetta.installDate
2017-07-14T19:29:19Z
ethz.rosetta.lastUpdated
2020-02-14T23:05:31Z
ethz.rosetta.versionExported
true
ethz.COinS
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Doctoral Thesis [29804]