Multi-degree-of-freedom micropositioning using stepping principles
dc.contributor.author
Zesch, Wolfgang
dc.contributor.supervisor
Schweitzer, Gerhard
dc.date.accessioned
2017-06-13T02:12:02Z
dc.date.available
2017-06-13T02:12:02Z
dc.date.issued
1997
dc.identifier.uri
http://hdl.handle.net/20.500.11850/143319
dc.identifier.doi
10.3929/ethz-a-001855164
dc.format
application/pdf
dc.language.iso
en
dc.publisher
ETH Zürich
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
NANOTECHNOLOGIE
dc.subject
MIKROMECHANIK (MASCHINENBAU)
dc.subject
MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK)
dc.subject
STELLANTRIEBE + STELLEINRICHTUNGEN (AUTOMATISCHE REGELUNG)
dc.subject
NANOTECHNOLOGY
dc.subject
MICROMACHINE (MECHANICAL ENGINEERING)
dc.subject
MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS)
dc.subject
SERVO-DRIVES + ACTUATORS (AUTOMATIC CONTROL)
dc.title
Multi-degree-of-freedom micropositioning using stepping principles
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
VIII, 130 S.
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::620 - Engineering & allied operations
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::620 - Engineering & allied operations
ethz.notes
Diss. Techn. Wiss. ETH Zürich, Nr. 12318, 1997. Ref.: G. Schweitzer ; Korref.: R. Y. Siegwart.
ethz.identifier.diss
12318
ethz.identifier.nebis
001855164
ethz.publication.place
Zurich
ethz.publication.status
published
ethz.date.deposited
2017-06-13T02:12:05Z
ethz.source
ECOL
ethz.identifier.importid
imp59366a13b0e6834775
ethz.ecolpid
eth:40935
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2017-07-19T05:55:46Z
ethz.rosetta.lastUpdated
2020-02-14T23:46:43Z
ethz.rosetta.versionExported
true
ethz.COinS
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Doctoral Thesis [29817]