The four pillars of nanopositioning for scanning probe microscopy
dc.contributor.author
Tuma, Tomas
dc.contributor.supervisor
Lygeros, John
dc.contributor.supervisor
Schitter, Georg
dc.date.accessioned
2017-06-13T21:10:59Z
dc.date.available
2017-06-13T21:10:59Z
dc.date.issued
2013
dc.identifier.uri
http://hdl.handle.net/20.500.11850/154234
dc.identifier.doi
10.3929/ethz-a-010039059
dc.format
application/pdf
dc.language.iso
en
dc.publisher
ETH
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
RASTERSONDENMIKROSKOPE, RSM + RASTERSONDENMIKROSKOPIE
dc.subject
NANOELEKTROMECHANISCHE BAUELEMENTE, NEMS (ELEKTROTECHNIK)
dc.subject
STELLANTRIEBE + STELLEINRICHTUNGEN (AUTOMATISCHE REGELUNG)
dc.subject
SCANNING PROBE MICROSCOPES, SPM + SCANNING PROBE MICROSCOPY
dc.subject
NANOELECTROMECHANICAL COMPONENTS, NEMS (ELECTRICAL ENGINEERING)
dc.subject
SERVO-DRIVES + ACTUATORS (AUTOMATIC CONTROL)
dc.title
The four pillars of nanopositioning for scanning probe microscopy
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
dc.date.published
2013
ethz.size
1 Band
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::620 - Engineering & allied operations
ethz.notes
Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 21520, 2013.
ethz.identifier.diss
21520
ethz.identifier.nebis
010039059
ethz.publication.place
Zürich
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02650 - Institut für Automatik / Automatic Control Laboratory::03751 - Lygeros, John / Lygeros, John
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02650 - Institut für Automatik / Automatic Control Laboratory::03751 - Lygeros, John / Lygeros, John
ethz.date.deposited
2017-06-13T21:20:19Z
ethz.source
ECOL
ethz.identifier.importid
imp59366b4de46b627668
ethz.ecolpid
eth:7829
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2017-07-25T22:26:06Z
ethz.rosetta.lastUpdated
2023-02-06T13:57:34Z
ethz.rosetta.versionExported
true
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Doctoral Thesis [29810]