Plasma Enhanced Chemical Vapor Deposition on Particulate Solid-State Materials for Improved Powder Processing
dc.contributor.author
Sonnenfeld, Axel
dc.contributor.author
Roth, Christian
dc.contributor.author
Dimitrova, Zorica
dc.contributor.author
Spillmann, Adrian
dc.contributor.author
Rudolf von Rohr, Philipp
dc.date.accessioned
2017-06-14T12:06:11Z
dc.date.available
2017-06-14T12:06:11Z
dc.date.issued
2009
dc.identifier.issn
1612-8850
dc.identifier.issn
1612-8869
dc.identifier.other
10.1002/ppap.200932202
dc.identifier.uri
http://hdl.handle.net/20.500.11850/157270
dc.language.iso
en
dc.publisher
Wiley
dc.subject
hexamethyldisiloxane (HMDSO)
dc.subject
particles
dc.subject
plasma enhanced chemical vapor deposition (PECVD)
dc.subject
powder compressibility
dc.subject
powder flowability
dc.title
Plasma Enhanced Chemical Vapor Deposition on Particulate Solid-State Materials for Improved Powder Processing
dc.type
Conference Paper
ethz.journal.title
Plasma Processes and Polymers
ethz.journal.volume
6
ethz.journal.issue
S1
ethz.journal.abbreviated
Plasma processes polym.
ethz.pages.start
S860
ethz.pages.end
S863
ethz.event
PSE Conference 2008
ethz.event.location
Garmisch-Partenkirchen, Germany
ethz.event.date
September 15-19, 2008
ethz.notes
Received 14 September 2008, Accepted 22 February 2009.
ethz.identifier.wos
ethz.identifier.nebis
005534892
ethz.publication.place
Weinheim
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-14T12:06:30Z
ethz.source
ECIT
ethz.identifier.importid
imp59364ce44900434951
ethz.ecitpid
pub:35580
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T22:57:06Z
ethz.rosetta.lastUpdated
2021-02-14T17:02:30Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [34962]