Publication status
publishedExternal links
Book title
Digest of technical papers / 2004 Symposium on VLSI Circuits, June 17-19, 2004, HonoluluPages / Article No.
Publisher
IEEEEvent
Subject
CMOS; MEMS; Atomic force microscopy; Cantilever array; Parallel scanning and PID controlOrganisational unit
03263 - Baltes, Henry03684 - Hierlemann, Andreas / Hierlemann, Andreas
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ETH Bibliography
yes
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