Fabrication and characterization of freestanding Si/Cr micro- and nanospirals
dc.contributor.author
Zhang, Li
dc.contributor.author
Dong, Lixin
dc.contributor.author
Bell, Dominik J.
dc.contributor.author
Nelson, Bradley J.
dc.contributor.author
Schönenberger, Christian
dc.contributor.author
Grützmacher, Detlev
dc.date.accessioned
2017-06-09T05:29:34Z
dc.date.available
2017-06-09T05:29:34Z
dc.date.issued
2006-04
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2006.01.154
dc.identifier.uri
http://hdl.handle.net/20.500.11850/22581
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Spiral nanobelts
dc.subject
Coiling up
dc.subject
Nano- manipulation
dc.subject
Shape-memory
dc.title
Fabrication and characterization of freestanding Si/Cr micro- and nanospirals
dc.type
Conference Paper
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
83
ethz.journal.issue
4-9
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
1237
ethz.pages.end
1240
ethz.event
Micro- and Nano-Engineering (MNE 2005)
ethz.event.location
Vienna, Austria
ethz.event.date
September 19-22, 2005
ethz.notes
Available online 20 February 2006.
ethz.identifier.wos
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.date.deposited
2017-06-09T05:29:51Z
ethz.source
ECIT
ethz.identifier.importid
imp59364d0247d8657320
ethz.ecitpid
pub:37449
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T23:33:43Z
ethz.rosetta.lastUpdated
2022-03-28T08:52:26Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [35310]