Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting
Publication status
publishedExternal links
Journal / series
Materials & DesignVolume
Pages / Article No.
Publisher
ElsevierSubject
Silicon; Fracture mechanisms; Temperature dependence; Pillar indentation; Focused ion beam damageOrganisational unit
03692 - Spolenak, Ralph / Spolenak, Ralph
Funding
166094 - DiaMicro - Using Nanomechanics to Understand Plasticity in Diamond-structured Crystals (SNF)
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