Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems
dc.contributor.author
Bauerdick, S.
dc.contributor.author
Stampfer, C.
dc.contributor.author
Helbling, T.
dc.contributor.author
Linden, A.
dc.contributor.author
Hierold, C.
dc.date.accessioned
2017-06-08T15:52:02Z
dc.date.available
2017-06-08T15:52:02Z
dc.date.issued
2006
dc.identifier.issn
1071-1023
dc.identifier.issn
0734-211X
dc.identifier.other
10.1116/1.2388965
dc.identifier.uri
http://hdl.handle.net/20.500.11850/2515
dc.language.iso
en
dc.publisher
American Institute of Physics
dc.title
Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems
dc.type
Conference Paper
ethz.journal.title
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
ethz.journal.volume
24
ethz.journal.issue
6
ethz.journal.abbreviated
J. Vac. Sci. Technol. B
ethz.pages.start
3144
ethz.pages.end
3147
ethz.event
50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofavrication
ethz.event.location
Baltimore, MD, USA
ethz.event.date
May 30 - June 2, 2006
ethz.notes
Received 31 May 2006, Accepted 9 October 2006, Published 4 December 2006.
ethz.identifier.wos
ethz.identifier.nebis
000604586
ethz.publication.place
Melville, NY
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-08T15:52:15Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b54393c115248
ethz.ecitpid
pub:12436
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-18T17:40:27Z
ethz.rosetta.lastUpdated
2022-03-28T07:19:29Z
ethz.rosetta.versionExported
true
ethz.COinS
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