A Multilevel CMOS-MEMS Design Methodology Based on Response Surface Models
dc.contributor.author
Sato, Norio
dc.contributor.author
Sato, Yasuhiro
dc.contributor.author
Kado, Yuichi
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Aemmer, Dolf
dc.contributor.author
Kaeslin, Hubert
dc.contributor.author
Fichtner, Wolfgang
dc.date.accessioned
2017-06-09T11:59:10Z
dc.date.available
2017-06-09T11:59:10Z
dc.date.issued
2011-06
dc.identifier.issn
1057-7157
dc.identifier.issn
1941-0158
dc.identifier.other
10.1109/JMEMS.2011.2140352
dc.identifier.uri
http://hdl.handle.net/20.500.11850/37578
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Bottom-up and top-down design methodology
dc.subject
Complementary metal-oxide-semiconductor (CMOS)
dc.subject
Fingerprint sensor
dc.subject
Microelectromechanical systems (MEMS)
dc.subject
Multilevel
dc.subject
Response surface model (RSM)
dc.subject
System performance
dc.title
A Multilevel CMOS-MEMS Design Methodology Based on Response Surface Models
dc.type
Journal Article
ethz.journal.title
Journal of Microelectromechanical Systems
ethz.journal.volume
20
ethz.journal.issue
3
ethz.pages.start
609
ethz.pages.end
621
ethz.notes
Manuscript received 25 March 2010, Revised 22 January 2011, Accepted 27 February 2011, Date of publication 11 May 2011, Date of current version 2 June 2011.
ethz.identifier.wos
ethz.identifier.nebis
000643917
ethz.publication.place
New York, NY
ethz.publication.status
published
ethz.date.deposited
2017-06-09T11:59:18Z
ethz.source
ECIT
ethz.identifier.importid
imp59364e3d0df3832915
ethz.ecitpid
pub:60099
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T12:11:52Z
ethz.rosetta.lastUpdated
2024-02-01T17:43:02Z
ethz.rosetta.versionExported
true
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