Limitations of Cl2/O2-based ICP-RIE of deep holes for planar photonic crystals in InP
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Date
2012-02Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Physica Status Solidi CVolume
Pages / Article No.
Publisher
WileySubject
Dry-etching; Indium phosphide; Photonic crystal; High aspect ratioOrganisational unit
03388 - Tröster, Gerhard (emeritus)
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ETH Bibliography
yes
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