Fabrication of quasiperiodic nanostructures with EUV interference lithography
Metadata only
Date
2012-03Type
- Journal Article
ETH Bibliography
yes
Altmetrics
Publication status
publishedExternal links
Journal / series
NanotechnologyVolume
Pages / Article No.
Publisher
IOP PublishingOrganisational unit
03661 - Löffler, Jörg F. / Löffler, Jörg F.
Notes
Received 2 November 2011.More
Show all metadata
ETH Bibliography
yes
Altmetrics