Microfabrication of X-ray gratings: towards non conventional profile control in high aspect ratio structures
dc.contributor.author
Shi, Zhitian
dc.contributor.supervisor
Stampanoni, Marco
dc.contributor.supervisor
Vogt, Ulrich
dc.contributor.supervisor
Romano, Lucia
dc.date.accessioned
2023-07-06T07:54:26Z
dc.date.available
2022-05-24T11:25:17Z
dc.date.available
2022-06-10T07:52:35Z
dc.date.available
2022-06-10T08:44:01Z
dc.date.available
2023-07-06T07:54:26Z
dc.date.issued
2022
dc.identifier.isbn
978-3-907234-97-6
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/548839
dc.identifier.doi
10.3929/ethz-b-000548839
dc.format
application/pdf
en_US
dc.language.iso
en
en_US
dc.publisher
ETH Zurich
en_US
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.title
Microfabrication of X-ray gratings: towards non conventional profile control in high aspect ratio structures
en_US
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
dc.date.published
2022-06-10
ethz.size
182 p.
en_US
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::600 - Technology (applied sciences)
en_US
ethz.identifier.diss
28257
en_US
ethz.publication.place
Zurich
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02631 - Institut für Biomedizinische Technik / Institute for Biomedical Engineering::03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02631 - Institut für Biomedizinische Technik / Institute for Biomedical Engineering::03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
en_US
ethz.date.deposited
2022-05-24T11:25:24Z
ethz.source
FORM
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.date.embargoend
2023-06-10
ethz.rosetta.installDate
2022-06-10T08:44:07Z
ethz.rosetta.lastUpdated
2024-02-03T01:12:56Z
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true
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Doctoral Thesis [29815]