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Backside liquid Phase Photolitography for Fabricating self-organizing hydrogel bilayers
(2012)Procedia Engineering ~ 26th European Conference on Solid-State Transducers, EUROSENSOR 2012We propose a backside exposure liquid phase photolithography platform for the fabrication of polymer microsystems. While conventional process strategies require a solidified polymer film prior to exposure, we utilize polymer encapsulation in order to directly cross-link the polymer from solution. Silane-based surface passivation and lift-off resist are used to control polymer adhesion after removal of the encapsulation. This process ...Conference Paper