Simulation of the Measurement by Scanning Electron Microscopy of Edge and Linewidth Roughness Parameters in Nanostructures
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Ilgünsatiroglu, Emre
dc.contributor.author
Illarionov, Alexey Yu
dc.date.accessioned
2017-06-11T15:44:03Z
dc.date.available
2017-06-11T15:44:03Z
dc.date.issued
2015
dc.identifier.isbn
978-1-4799-6911-1
dc.identifier.other
10.1109/ULIS.2015.7063749
dc.identifier.uri
http://hdl.handle.net/20.500.11850/97016
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Metrology
dc.subject
Scanning Electron Microscopy
dc.subject
Critical Dimensions
dc.subject
Line Edge Roughness
dc.subject
Monte Carlo Modeling
dc.title
Simulation of the Measurement by Scanning Electron Microscopy of Edge and Linewidth Roughness Parameters in Nanostructures
dc.type
Conference Paper
ethz.book.title
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
ethz.pages.start
205
ethz.pages.end
208
ethz.size
4 p.
ethz.event
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
ethz.event.location
Bologna, Italy
ethz.event.date
January 26-28, 2015
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02636 - Institut für Integrierte Systeme / Integrated Systems Laboratory::03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02636 - Institut für Integrierte Systeme / Integrated Systems Laboratory::03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
ethz.date.deposited
2017-06-11T15:44:31Z
ethz.source
ECIT
ethz.identifier.importid
imp593652db0309a85984
ethz.ecitpid
pub:151907
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T15:32:50Z
ethz.rosetta.lastUpdated
2022-03-28T13:36:36Z
ethz.rosetta.versionExported
true
ethz.COinS
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